Refurbishment

Re-Manufacturing of Semiconduct equipment

Endura 5500 PVD

AL chamber

TTN Chamber

MoCVD

Preclean

HTHU Chamber

Encore Chamber

Centura 5200 Etch
Poly / Metal Etch

MxP

MxP Plus

DPS

DPS Plus

Oxide Etch

MxP

MxP Plus

eMax

Super e

Centura 5200 CVD
SACVD

BPSG

USG

PECVD

PETEOS

PESIH4

SION

HDP

PETEOS

PESIH4

SION

Producer CVD
SACVD

BPSG

USG

PECVD

PETEOS

PESIH4

SION

TPCC/HTF

RTP

RPI

Radiance

MOD

  • System Remanufacturing
  • Wafer Size Conversion
  • Chamber Retrofit