SMI Co., Ltd.

RPS_XSTREAM

3151806-202F

Advanced Energy

RF Frequency

225KHz to 667KHz

Power Accuracy

±5% of set point or ±200W, whichever is greater (measured at equivalent plasma impedance of 1.2 ohms)

Operational load Limits

Operational load needs to be within the operational limits

Minimum plasma power

1000 W

Maximum plasma power

8000 W

Maximum Plasma voltage

145 Vrms

Maximum power supply current

107 Arms

Electrical Efficiency

Better than 80% @ full-rated power nominal line

Power Factor

Better than 0.90

Zero Setpoint

When setpoint is zero or negative or when interlock is not satisfied, digital and display read backs show less than 1W and actual power delivered is less then 1W

Duty Cycle

Continuous operation within specified operating range

0920-00088

0920-00124

0920-00130

RF GEN_RAPID OE (Axiom Generator)

3151802-003

3151802-004

5707040-B

Advanced Energy

250 to 666 kHz

Power Accuracy : referenced at plasma load +/- 5% of 200 W whichever is greater

Operational load needs to be within the operational limits

500 W

6000 W

325 Vrms

5 Arms

120 Arms

Better than 80% @ full-rated power nominal line

Better than 0.90

When setpoint is zero or negative or when interlock is not satisfied, digital and display read backs show less than 1W and actual power delivered is less then 1W

Continuous operation within specified operating range

RF GENERATOR

AX7695LAM-10

685-045903-034

MKS

180 - 228 volts (200-208 service), three phase, three-wire plus ground, 50/60 Hz, 30 AMP service recommended (26A RMS draw under full load)

The ASTRONp is supplied with a 10’ un-terminated SO cable. The user will supply the appropriate connector for connection to their system.

Phases A, B, C (phase insensitive)

Earth ground.

3 x 30 A, 660 VAC fuse (not user serviceable)

5-40℃

20 micron

Facility Water

1.5 gpm

0.5 gpm

32 +/- 3 psid at 1.5 gpm

30℃

Ambient dew point or 15℃, which ever is greater

100 psig

9/16-18 SAE/MS threads, compatible with Swagelok: SS-400-1-6ST, SS-600-2-6ST, SS-600-5-6ST fittings

O2, N2 (Contact MKS ASTeX Products for use with other gasses)

1/4” VCR

Viton V1260-75 o-ring in gas inlet

If a downstream transport tuve is used the following are recommended:

Minimum 1.0 inch (2.5 mm) ID to minimize pressure rise and transport losses.

Made of suitable material for the process gasses.

O-rings should be of suitable material for the process gasses.

Use of baffle plates, showerheads, or other flow distribution devides between the ASTRON outlet and the process chamber will result in higher operating pressure at ASTRON than in the process chamber. For best opertion, ASTRON operating pressure specification must be met at ASTRON outlet. It is recommended that gas conductance measurements for the cleaning gas transport plumbing be carried out to ensure correct operating pressure at the ASTON (see section 3.0 for operating requirements).

6061-T6 Aluminum

KALREZ 8575UP-o-ring

S_iO₂ - GE 124

SS 316L - gas line

Ni - VCR seal

MKS_PARAGON_RPS

AX7710IPS-30

RPS

MKS

400 KHz

IGNITION : 100% Ar for Ignition Only

Process : UP to 6SLM of NF3 (post ignition NF3 can be added and the Ar removed)

During Ignition : 1 to 8 Torr @ 1 to 5 slm for Ar (pressure measured at ASTRON outlet)

Post Ignition : 1 to 10 Torr post ignition 1 to 6 slm (pressure measured at ASTRON outlet)

Reactant Output (NF3 Operation) >95% dissociation across operating space, 1-10T, 1-6 slm (pressure measured at ASTRON outlet)

2 sec on time min, to 100%

PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina

EtherCAT, opto isolated I/O

25 pin D connector, opto isolated I/O

Power 180 to 228 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)

Cooling water 2.0 gpm, < 30°C

Ambient 40°C max