REPAIR
TEMP CONTROLLER
| Equipment | Process | OEM P/N |
|---|---|---|
|
AMAT DPS 300mm |
ETCH |
0190-26495 |
AMAT MESA LID HEATER
| Part Number | Product name | Used equipment | Improvement |
|---|---|---|---|
|
0190-30401 |
MESA Lid Heater |
AMAT MINOS |
Arcing and durability improvement |
| Items | Before | After | Details |
|---|---|---|---|
|
Heater connection cable |
Withstand voltage 400V |
Withstand voltage 1200V |
Arcing improvement by applying reinforced cable |
|
Fixed Pin (between wing parts) |
有 |
無 |
Insulation layer reinforced |
|
Gas Block Heater connection cable |
有 |
無 |
Arcing improvements (Heating wire arrangement change) |
|
Aluminum form through the gas line |
2 Ply |
1 Ply |
durability improvement |
DPS VALVE
| Equipment | Process | OEM P/N | Description | |
|---|---|---|---|---|
|
AMAT DPS 300mm |
ETCH |
|
In-Line Valve |
|
|
AMAT DPS 300mm |
ETCH |
0190-23498 |
Turbo Isolation Valve |
|
|
AMAT DPS 300mm |
ETCH |
|
Manometer Valve |
|
|
Novellus Vector 300mm |
CVD |
|
Butterfly Valve |
|
|
TEL TRIAS300mm |
ETCH |
|
Throttle Valve |
|
