REPAIR

TEMP CONTROLLER
Equipment Process OEM P/N

AMAT DPS 300mm

ETCH

0190-26495

AMAT MESA LID HEATER
Part Number Product name Used equipment Improvement

0190-30401

MESA Lid Heater

AMAT MINOS

Arcing and durability improvement

Items Before After Details

Heater connection cable

Withstand voltage 400V

Withstand voltage 1200V

Arcing improvement by applying reinforced cable

Fixed Pin (between wing parts)

Insulation layer reinforced

Gas Block Heater connection cable

Arcing improvements (Heating wire arrangement change)

Aluminum form through the gas line

2 Ply

1 Ply

durability improvement

DPS VALVE
Equipment Process OEM P/N Description

AMAT DPS 300mm

ETCH

 

In-Line Valve

AMAT DPS 300mm

ETCH

0190-23498

Turbo Isolation Valve

AMAT DPS 300mm

ETCH

 

Manometer Valve

Novellus Vector 300mm

CVD

 

Butterfly Valve

TEL TRIAS300mm

ETCH

 

Throttle Valve