Equipment | Process | OEM P/N |
---|---|---|
AMAT DPS 300mm |
ETCH |
0190-26495 |
Part Number | Product name | Used equipment | Improvement |
---|---|---|---|
0190-30401 |
MESA Lid Heater |
AMAT MINOS |
Arcing and durability improvement |
Items | Before | After | Details |
---|---|---|---|
Heater connection cable |
Withstand voltage 400V |
Withstand voltage 1200V |
Arcing improvement by applying reinforced cable |
Fixed Pin (between wing parts) |
有 |
無 |
Insulation layer reinforced |
Gas Block Heater connection cable |
有 |
無 |
Arcing improvements (Heating wire arrangement change) |
Aluminum form through the gas line |
2 Ply |
1 Ply |
durability improvement |
Equipment | Process | OEM P/N | Description | |
---|---|---|---|---|
AMAT DPS 300mm |
ETCH |
|
In-Line Valve |
|
AMAT DPS 300mm |
ETCH |
0190-23498 |
Turbo Isolation Valve |
|
AMAT DPS 300mm |
ETCH |
|
Manometer Valve |
|
Novellus Vector 300mm |
CVD |
|
Butterfly Valve |
|
TEL TRIAS300mm |
ETCH |
|
Throttle Valve |