Product
Parts Localized
Parts Localized
| Localized Parts | Equipment | Process | OEM P/N |
|---|---|---|---|
|
TCP |
LAM 300mm FLEX, FLEX45, KIYO |
Etch |
853-017892-201(7.1KW) |
HIGH GAP HANGER
SMI : 713-037072-003
Low GAP HANGER
SMI : 713-037069-003
NUT HANGER
SMI : 839-039317-003
PAD WASHER SPACER
SMI : 713-034965-001
D-WASHER
SMI : 713-034964-001
SLEEVE
SMI : 713-027299-002 SYSTA : 713-027299-002
WASHER FLAT Confiment Ring
713-040539-001(Z)| Classification | Description |
|---|---|
|
Product |
LAM Zirconia Part |
|
Material |
PEEK → Zirconia |
|
Application |
LAM ETCH |
|
REV |
Change the material from PEEK to ZIRCONIA |
|
Main Supply Contractor |
SK-Hynix, UMC, Micron, etc |
|
Product description |
PEEK, the original part in the SKHYNIX ETCH LAM facility, was changed to Zirconia to extend the use cycle and improve some items to be used semi-permanently |
CONDUCTOR, BIAS
300MM, HDPCVD, ULTIMA
(I)SKT, PLASMA SNSR
715-038611-002
(A)QTZ PIN_PIN, ALIGN, UPR
ELCTD, 300MM_
ASSY, STUD, SOCKET.300MM;
P/N : 839-070842-004
I*)ESC WATER
MANIFOLD(ULTEM)_ULTIMA
ACCESSORY_FACE SEAL
GAS INJCTR(2300 POLY)
(I)LIFT PIN HOLDER HOUSING
LPHH-0101
(I)LIFT PIN HOLDER BASE
LPHB-0101| Description | Application | Vendor P/N | SAP N/O | Business Start | Installation |
|---|---|---|---|---|---|
|
300mm Robot Blade |
YASKAWA, BROOKS KAWASAKI, PSK |
|
|
Since 2011 |
SK Hynix |
|
Background & Development |
|||||
|
1. Cost reduction and delivery time improvement compared to OEM parts |
|||||
KAWASAKI OLD TYPE
KAWASAKI NEW TYPE
PSK SUPRA3 BLADE
YASKAWA BLADE
Flatness Test w/o wafer
Flatness Test w/o wafer
Sensor Test
Pad standard test
| Part Number | Product name | Equipment | Improvement |
|---|---|---|---|
|
678-031432-004 |
Temerature Control Ring |
LAM KIYO Poly KIYO45 |
Arcing and durability improvement |
| Before | After | Details |
|---|---|---|
|
SUS Pattern Heater Film Pattern Heater causes frequent arcing between aluminum plates : the main cause of arcing is due to the gaps made by thermal expansion between materials, frequent operation, resin (silicon or epoxy) falling off, etc |
Ni_Cr Wire Heater Ni_Cr wire is inserted into the aluminum plate body to produce a structure that does not generate arcing even if gaps occur. In addition, a heater with a heating wire, which is more durable than a pattern heater, is used. |
Reduces arcing, prevents film heater fail, improves heater life time, improves durability, etc |
| Equipment | Process | OEM P/N |
|---|---|---|
|
LAM FLEX 300mm |
ETCH |
715-009191-001 |